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Ultra High Purity Diaphragm Valves

AP Tech manufactures gas handling components for applications ranging from source cylinder to distribution and point of use to inside a process tool. Pressure ratings and flow capacities accommodate most typical applications for pressure regulators and valves to one inch line size. Product ratings extend to pressures of 10,000 psig (700 bar) and flow rates to 5,000 slpm.


Ultra High Purity Diaphragm Valves

APTech valves are used for semiconductor wafer fabrication and other clean industries such as solar and flat panel displays. AP Tech also services many other industries delivering specialty and bulk gases for a wide variety of applications.

*Available in 316L VAR secondary remelt or special alloys, * Surface finish options 15 Ra max/10 Ra avg (10, 7, 5 Ra max options), *LOTO and indiacating switch options, *Manual and Air Actuation

  • Springless Diaphragm Valves
  • High Pressure High Flow Diaphragm Valves
  • Metal Seated Diaphragm Valves
  • Bulk / Mono BlockValves 3/8″ to 1 1/2 inch
  • LOTO Lock out tag out Valves
  • Multiport Diaphragm Valves
  • Surface Mount Devices

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