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High Purity Liquid Filtration

Entegris provides a full line of filters to solve a wide variety of contamination control challenges for Point of Use, Point of Tool, Facilities Distribution & Chemical Manufacturing.

Description

Entegris

Entegris provides a full line of filters to solve a wide variety of contamination control challenges for Point of Use, Point of Tool, Facilities Distribution & Chemical Manufacturing. The Entegris liquid filtration line includes well-known brands such as Torrento, Quickchange, Optimizer, Fluorogard, Impact 2, Planargard, Wafergard, Guardian, Protego, Intercept, Microgard & Savana.

These products incorporate membranes such as surface modified Fluoropolymers, PTFE, UPE, PVDF, PES & Polypropylene.

  • Wet Etch & Clean – Aggressive Acids & Bases – High Concentrations, Elevated Temperature
  • CMP Slurry – Distribution, Point of Use & Point of Tool
  • CMP Brushes – reduced defectivity, quicker startup
  • CMP Brushes – reduced defectivity, quicker startup
  • Photolithography – Developer, Photo Resist, Resist Stripper
  • Impact 8G advanced, critical lithography, rapid priming, improves bubble clearance, reduce COO
  • Electroplating – Cu & Ni Plating, reduced potential for microbubble formation
  • Solvent Filtration – Organic
  • DI Water & Ozonated DI

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